Inventor · disambiguated record
Klaus Anger
Also filed as: ANGER KLAUS
8 granted patents·115 citations·filing 1976–1984
87Inventor score
Technology areasH01J
Files withSIEMENS AG8
Top patents by PatentIndex Score
8 records- 0189US4140913ACharged-particle beam optical apparatus for the reduction imaging of a mask on a specimenSIEMENS AG·Filed 1978·Granted Feb 20, 1979·32 cites·13 claims
- 0288US4514638AElectron-optical system with variable-shaped beam for generating and measuring microstructuresSIEMENS AG·Filed 1984·Granted Apr 30, 1985·31 cites·17 claims
- 0367US4136285AMethod for irradiating a specimen by corpuscular-beam radiationSIEMENS AG·Filed 1976·Granted Jan 23, 1979·12 cites·1 claims
- 0462US4335309AMethod and device for the rapid deflection of a particle beamSIEMENS AG·Filed 1980·Granted Jun 15, 1982·10 cites·4 claims
- 0560US4393308AHigh current electron sourceSIEMENS AG·Filed 1981·Granted Jul 12, 1983·10 cites·6 claims
- 0655US4090077AParticle beam device with a deflection system and a stigmatorSIEMENS AG·Filed 1976·Granted May 16, 1978·8 cites·1 claims
- 0752US4246487AMethod and device for determining the focal length of a long focal length electron optical lensSIEMENS AG·Filed 1979·Granted Jan 20, 1981·6 cites·10 claims
- 0852US4238680AMethod and device for setting and correcting errors of an electron optical condenser of a microprojectorSIEMENS AG·Filed 1979·Granted Dec 9, 1980·6 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →