Inventor · disambiguated record
Klaus Hegele
Also filed as: HEGELE KLAUS
2 granted patents·1 pending application·0 citations·filing 2010–2016
23Inventor score
Technology areasH01J
Top patents by PatentIndex Score
3 records- 0147US2013270437A1Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the methodZEISS CARL MICROSCOPY GMBH·Filed 2013·Application pending·0 cites
- 0243US8471202B2Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the methodBIBERGER JOSEF·Filed 2010·Granted Jun 25, 2013·0 cites·23 claims
- 0330US9947504B2Particle beam apparatus and method for operating a particle beam apparatusZEISS CARL MICROSCOPY GMBH·Filed 2016·Granted Apr 17, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →