Inventor · disambiguated record
Klaus Penner
Also filed as: PENNER KLAUS · PENNER KLAUS DIETER
6 granted patents·2 pending applications·273 citations·filing 1996–2006
86Inventor score
Files withSIEMENS AG3IBM2INFINEON TECHNOLOGIES AG1INFINEON TECHNOLOGIES CORP1RAMACHANDRAN RAVIKUMAR1
Top patents by PatentIndex Score
8 records- 0190US5800626AControl of gas content in process liquids for improved megasonic cleaning of semiconductor wafers and microelectronics substratesIBM·Filed 1997·Granted Sep 1, 1998·142 cites·14 claims
- 0276US6245640B1Method for fabricating a semiconductor structureSIEMENS AG·Filed 1999·Granted Jun 12, 2001·57 cites·8 claims
- 0369US6544856B2Method for increasing the trench capacitanceINFINEON TECHNOLOGIES AG·Filed 2001·Granted Apr 8, 2003·14 cites·6 claims
- 0460US6190955B1Fabrication of trench capacitors using disposable hard maskIBM·Filed 1998·Granted Feb 20, 2001·25 cites·19 claims
- 0556US5956142AMethod of end point detection using a sinusoidal interference signal for a wet etch processSIEMENS AG·Filed 1997·Granted Sep 21, 1999·20 cites·10 claims
- 0647US5683945AUniform trench fill recess by means of isotropic etchingSIEMENS AG·Filed 1996·Granted Nov 4, 1997·15 cites·9 claims
- 0736US2006118522A1Etching composition and use thereof with feedback control of HF in BEOL cleanRAMACHANDRAN RAVIKUMAR·Filed 2006·Application pending·0 cites
- 0833US2003209514A1Etching composition and use thereof with feedback control of HF in BEOL cleanINFINEON TECHNOLOGIES CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →