Inventor · disambiguated record
Klaus Rinn
Also filed as: RINN KLAUS
19 granted patents·4 pending applications·371 citations·filing 1997–2010
95Inventor score
Files withLEICA MICROSYSTEMS10VISTEC SEMICONDUCTOR SYS GMBH10FRICKE WOLFGANG1RINN KLAUS1VISTEC SEMICONDUCTOR SYSTEM GMBH1
Top patents by PatentIndex Score
23 records- 0190US6008902AMethod and device for heterodyne interferometer error correctionLEICA MICROSYSTEMS·Filed 1997·Granted Dec 28, 1999·89 cites·13 claims
- 0287US7420670B2Measuring instrument and method for operating a measuring instrument for optical inspection of an objectVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Granted Sep 2, 2008·10 cites·18 claims
- 0383US6317991B1Method for correcting measurement errors in a machine measuring co-ordinatesLEICA MICROSYSTEMS·Filed 1998·Granted Nov 20, 2001·55 cites·7 claims
- 0480US6920249B2Method and measuring instrument for determining the position of an edge of a pattern element on a substrateLEICA MICROSYSTEMS·Filed 2001·Granted Jul 19, 2005·50 cites·16 claims
- 0579US7548321B2Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Granted Jun 16, 2009·10 cites·9 claims
- 0679US6549648B1Method for determining a position of a structural element on a substrateLEICA MICROSYSTEMS·Filed 1999·Granted Apr 15, 2003·48 cites·11 claims
- 0777US7694426B2Method for eliminating sources of error in the system correction of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Apr 13, 2010·9 cites·10 claims
- 0874US6323953B1Method and device for measuring structures on a transparent substrateLEICA MICROSYSTEMS·Filed 1999·Granted Nov 27, 2001·43 cites·38 claims
- 0971US6559458B2Measuring instrument and method for measuring features on a substrateLEICA MICROSYSTEMS·Filed 2001·Granted May 6, 2003·26 cites·12 claims
- 1070US7823295B2Method for calibration of a measuring table of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2010·Granted Nov 2, 2010·3 cites·8 claims
- 1162US7654007B2Method for improving the reproducibility of a coordinate measuring apparatus and its accuracyVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Feb 2, 2010·4 cites·12 claims
- 1261US8248618B2Method for determining positions of structures on a maskRINN KLAUS·Filed 2010·Granted Aug 21, 2012·4 cites·11 claims
- 1358US6924900B2Method and microscope for detection of a specimenLEICA MICROSYSTEMS·Filed 2002·Granted Aug 2, 2005·8 cites·23 claims
- 1455US8115808B2Coordinate measuring machine and method for calibrating the coordinate measuring machineFRICKE WOLFGANG·Filed 2008·Granted Feb 14, 2012·4 cites·12 claims
- 1555US7680616B2Method for correcting an error of the imaging system of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Mar 16, 2010·2 cites·9 claims
- 1653US6816263B2Interferometric measurement apparatus for wavelength calibrationLEICA MICROSYSTEMS·Filed 2002·Granted Nov 9, 2004·4 cites·11 claims
- 1751US7939789B2Method for reproducibly determining geometrical and/or optical object characteristicsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted May 10, 2011·0 cites·15 claims
- 1850US6825939B2Method and measuring arrangement for detecting an objectLEICA MICROSYSTEMS·Filed 2002·Granted Nov 30, 2004·2 cites·36 claims
- 1941US2009073458A1Means and method for determining the spatial position of moving elements of a coordinate measuring machineVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 2041US2009051932A1Method for determining the position of a measurement objective in the z-coordinate direction of an optical measuring machine having maximum reproducibility of measured structure widthsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 2136US2002196331A1Method for reading out a detection chip of an electronic cameraLEICA MICROSYSTEMS·Filed 2002·Application pending·0 cites
- 2235US7864319B2Device and method for determining an optical property of a maskVISTEC SEMICONDUCTOR SYSTEM GMBH·Filed 2008·Granted Jan 4, 2011·0 cites·15 claims
- 2334US2007103667A1Substrate support apparatus for use in a position measuring deviceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →