Inventor · disambiguated record
Klaus Roithner
Also filed as: ROITHNER KLAUS · ROITHNER KLAUS B
7 granted patents·276 citations·filing 1995–1998
88Inventor score
Top patents by PatentIndex Score
7 records- 0185US6294026B1Distribution plate for a reaction chamber with multiple gas inlets and separate mass flow control loopsSIEMENS AG·Filed 1996·Granted Sep 25, 2001·73 cites·20 claims
- 0280US6537418B1Spatially uniform gas supply and pump configuration for large wafer diametersSIEMENS AG·Filed 1997·Granted Mar 25, 2003·63 cites·2 claims
- 0380US5605600AEtch profile shaping through wafer temperature controlIBM·Filed 1995·Granted Feb 25, 1997·61 cites·26 claims
- 0468US5776808APad stack with a poly SI etch stop for TEOS mask removal with RIESIEMENS AG·Filed 1996·Granted Jul 7, 1998·37 cites·30 claims
- 0560US6190955B1Fabrication of trench capacitors using disposable hard maskIBM·Filed 1998·Granted Feb 20, 2001·25 cites·19 claims
- 0645US5592412AEnhanced deep trench storage node capacitance for DRAMSIEMENS AG·Filed 1995·Granted Jan 7, 1997·12 cites·20 claims
- 0736US6066570AMethod and apparatus for preventing formation of black silicon on edges of wafersSIEMENS AG·Filed 1998·Granted May 23, 2000·5 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Klaus Roithner files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →