Inventor · disambiguated record
Klaus Thurner
Also filed as: THURNER KLAUS
2 granted patents·6 citations·filing 2014–2015
43Inventor score
Technology areasG01B
Files withATTOCUBE SYSTEMS AG2
Top patents by PatentIndex Score
2 records- 0176US9829306B2Absolute distance laser interferometerATTOCUBE SYSTEMS AG·Filed 2014·Granted Nov 28, 2017·6 cites·14 claims
- 0227US10260863B2Interferometric displacement sensor for integration into machine tools and semiconductor lithography systemsATTOCUBE SYSTEMS AG·Filed 2015·Granted Apr 16, 2019·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →