Inventor · disambiguated record
Kousa Hirota
Also filed as: HIROTA KOUSA
5 granted patents·4 pending applications·7 citations·filing 2007–2014
69Inventor score
Top patents by PatentIndex Score
9 records- 0167US10020233B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2013·Granted Jul 10, 2018·2 cites·3 claims
- 0262US8500912B2Plasma processing method and plasma processing apparatusHIROTA KOUSA·Filed 2011·Granted Aug 6, 2013·2 cites·8 claims
- 0359US8236701B2Plasma processing apparatus and plasma processing methodSUMIYA MASAHIRO·Filed 2009·Granted Aug 7, 2012·1 cites·4 claims
- 0459US8114244B2Method for etching a sampleHIROTA KOUSA·Filed 2009·Granted Feb 14, 2012·2 cites·8 claims
- 0545US2012252200A1Plasma processing apparatus and plasma processing methodSUMIYA MASAHIRO·Filed 2012·Application pending·0 cites
- 0645US2010178415A1Method for seasoning plasma processing apparatus, and method for determining end point of seasoningHITACHI HIGH TECH CORP·Filed 2009·Application pending·0 cites
- 0743US9190336B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2014·Granted Nov 17, 2015·0 cites·8 claims
- 0837US2007232067A1Semiconductor Fabrication Method and Etching SystemHIROTA KOUSA·Filed 2007·Application pending·0 cites
- 0936US2015041060A1Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →