Inventor · disambiguated record
Kozo Mochiji
Also filed as: MOCHIJI KOZO
19 granted patents·379 citations·filing 1979–1995
95Inventor score
Files withHITACHI LTD19
Top patents by PatentIndex Score
19 records- 0184US5372916AX-ray exposure method with an X-ray mask comprising phase shifter sidewallsHITACHI LTD·Filed 1992·Granted Dec 13, 1994·44 cites·9 claims
- 0281US5305364AProjection type X-ray lithography apparatusHITACHI LTD·Filed 1992·Granted Apr 19, 1994·38 cites·19 claims
- 0377US5714757ASurface analyzing method and its apparatusHITACHI LTD·Filed 1995·Granted Feb 3, 1998·32 cites·32 claims
- 0477US4315984AMethod of producing a semiconductor deviceHITACHI LTD·Filed 1980·Granted Feb 16, 1982·43 cites·5 claims
- 0576US5527731ASurface treating method and apparatus thereforHITACHI LTD·Filed 1993·Granted Jun 18, 1996·58 cites·13 claims
- 0675US4670650AMethod of measuring resist patternHITACHI LTD·Filed 1985·Granted Jun 2, 1987·26 cites·11 claims
- 0772US5485497AOptical element and projection exposure apparatus employing the sameHITACHI LTD·Filed 1994·Granted Jan 16, 1996·25 cites·24 claims
- 0872US4403151AMethod of forming patternsHITACHI LTD·Filed 1981·Granted Sep 6, 1983·26 cites·12 claims
- 0964US4788698AX-ray exposure systemHITACHI LTD·Filed 1987·Granted Nov 29, 1988·16 cites·14 claims
- 1061US5017458AMethod for production of graft copolymer, pattern replication method, and base polymer and resist for graft copolymerizationHITACHI LTD·Filed 1989·Granted May 21, 1991·13 cites·9 claims
- 1155US4307176AMethod of forming a patternHITACHI LTD·Filed 1979·Granted Dec 22, 1981·11 cites·12 claims
- 1244US4981771APattern fabricating methodHITACHI LTD·Filed 1989·Granted Jan 1, 1991·7 cites·5 claims
- 1340US4719161AMask for X-ray lithography and process for producing the sameHITACHI LTD·Filed 1986·Granted Jan 12, 1988·7 cites·6 claims
- 1440US4514857AX-Ray lithographic systemHITACHI LTD·Filed 1983·Granted Apr 30, 1985·9 cites·4 claims
- 1539US4701940ALinearly polarized X-ray patterning processHITACHI LTD·Filed 1985·Granted Oct 20, 1987·6 cites·5 claims
- 1639US4599737AX-ray mask with Ni patternHITACHI LTD·Filed 1983·Granted Jul 8, 1986·5 cites·17 claims
- 1738US4960676AMethod for forming pattern by using graft copolymerizationHITACHI LTD·Filed 1988·Granted Oct 2, 1990·7 cites·2 claims
- 1838US4954424APattern fabrication by radiation-induced graft copolymerizationHITACHI LTD·Filed 1988·Granted Sep 4, 1990·4 cites·13 claims
- 1932US5177773AX-ray mask and method for producing sameHITACHI LTD·Filed 1991·Granted Jan 5, 1993·2 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →