Inventor · disambiguated record
Koyo Morita
Also filed as: MAEJIMA HISASHI · MORITA KOYO
8 granted patents·286 citations·filing 1978–2002
89Inventor score
Top patents by PatentIndex Score
8 records- 0190US5208437AMethod of cutting interconnection pattern with laser and apparatus thereofHITACHI LTD·Filed 1991·Granted May 4, 1993·139 cites·21 claims
- 0282US4298273AProjection aligner and method of positioning a waferHITACHI LTD·Filed 1979·Granted Nov 3, 1981·34 cites·29 claims
- 0380US4598197AProjection alignerHITACHI LTD·Filed 1983·Granted Jul 1, 1986·41 cites·16 claims
- 0466US5229569ALaser machining apparatus and method of the sameHITACHI LTD·Filed 1991·Granted Jul 20, 1993·24 cites·26 claims
- 0557US4701608AProjection aligner with a sensor for monitoring light quantityHITACHI LTD·Filed 1986·Granted Oct 20, 1987·19 cites·21 claims
- 0656US4218136AMethod of and apparatus for aligning photomaskHITACHI LTD·Filed 1978·Granted Aug 19, 1980·12 cites·10 claims
- 0749US4780606AProjection aligner method utilizing monitoring of light quantityHITACHI LTD·Filed 1987·Granted Oct 25, 1988·14 cites·29 claims
- 0847US6740171B2Manufacturing method of semiconductor integrated circuit deviceRENESAS TECH CORP·Filed 2002·Granted May 25, 2004·3 cites·31 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →