Inventor · disambiguated record
Kouzi Takahata
Also filed as: TAKAHATA KOUZI
3 granted patents·30 citations·filing 1996–1998
71Inventor score
Technology areasH01J
Files withFUJITSU LTD3
Top patents by PatentIndex Score
3 records- 0166US5949078ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1998·Granted Sep 7, 1999·16 cites·13 claims
- 0249US5895924ACharged particle beam exposure method and apparatusFUJITSU LTD·Filed 1996·Granted Apr 20, 1999·9 cites·24 claims
- 0344US5872366ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1997·Granted Feb 16, 1999·5 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →