Inventor · disambiguated record
Koki Tamagawa
Also filed as: TAMAGAWA KOKI
11 granted patents·3 pending applications·905 citations·filing 1996–2015
90Inventor score
Technology areasH10P
Top patents by PatentIndex Score
14 records- 0197US8023248B2Electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2010·Granted Sep 20, 2011·155 cites·6 claims
- 0296US5777838AElectrostatic chuck and method of attracting waferFUJITSU LTD·Filed 1996·Granted Jul 7, 1998·611 cites·15 claims
- 0393US8441772B2Substrate for electrostatic chuck and electrostatic chuckYOSHIKAWA TADAYOSHI·Filed 2010·Granted May 14, 2013·44 cites·10 claims
- 0490US8199454B2Electrostatic chuck and substrate temperature adjusting-fixing deviceKOYAMA TOMOAKI·Filed 2008·Granted Jun 12, 2012·82 cites·16 claims
- 0575US8505928B2Substrate temperature control fixing apparatusSAITO MIKI·Filed 2009·Granted Aug 13, 2013·8 cites·7 claims
- 0668US9252039B2Electrostatic chuck apparatusSHINKO ELECTRIC IND CO·Filed 2014·Granted Feb 2, 2016·2 cites·8 claims
- 0768US9120704B2Dielectric layer for electrostatic chuck and electrostatic chuckNIPPON TUNGSTEN·Filed 2013·Granted Sep 1, 2015·2 cites·10 claims
- 0858US8641825B2Substrate temperature regulation fixed apparatusYONEKURA HIROSHI·Filed 2009·Granted Feb 4, 2014·1 cites·3 claims
- 0951US8686743B2Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatusFURUMURA YUJI·Filed 2009·Granted Apr 1, 2014·0 cites·14 claims
- 1049US8068326B2Electrostatic chuck and substrate temperature control fixing apparatusKOYAMA TOMOAKI·Filed 2009·Granted Nov 29, 2011·0 cites·15 claims
- 1145US2009159590A1Substrate temperature adjusting-fixing devicesSHINKO ELECTRIC IND CO·Filed 2008·Application pending·0 cites
- 1245US2008110874A1Substrate heating deviceSHINKO ELECTRIC IND CO·Filed 2007·Application pending·0 cites
- 1345US2008037196A1Electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2007·Application pending·0 cites
- 1441US9837297B2Tray and wafer holding apparatusSHINKO ELECTRIC IND CO·Filed 2015·Granted Dec 5, 2017·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →