Inventor · disambiguated record
Koji Tange
Also filed as: TANGE KOJI
4 granted patents·3 pending applications·10 citations·filing 2000–2005
67Inventor score
Top patents by PatentIndex Score
7 records- 0154US6511792B2Developing process, process for forming pattern and process for preparing semiconductor device using sameMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Jan 28, 2003·7 cites·14 claims
- 0244US6639232B1Pattern writing method employing electron beam writing device of variable-shaped vector scan systemMITSUBISHI ELECTRIC CORP·Filed 2002·Granted Oct 28, 2003·2 cites·2 claims
- 0342US7001470B2Cleaning process for photomasksRENESAS TECH CORP·Filed 2002·Granted Feb 21, 2006·1 cites·3 claims
- 0442US2005274392A1Cleaning process for photomasksRENESAS TECH CORP·Filed 2005·Application pending·0 cites
- 0538US2005255389A1Phase shift mask and method of producing the sameRENESAS TECH CORP·Filed 2005·Application pending·0 cites
- 0636US6338923B1Photolithography mask having monitoring marks and manufacturing method thereofMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Jan 15, 2002·0 cites·12 claims
- 0733US2004153989A1Pattern writing method capable of preventing or reducing an error between design dimensions and finished dimensions of a patternRENESAS TECH CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →