Inventor · disambiguated record
Kohsaku Yano
Also filed as: YANO KOHSAKU
8 granted patents·555 citations·filing 1984–1992
89Inventor score
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD8
Top patents by PatentIndex Score
8 records- 0198US5125358AMicrowave plasma film deposition systemMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1989·Granted Jun 30, 1992·353 cites·2 claims
- 0293US4977104AMethod for producing a semiconductor device by filling hollows with thermally decomposed doped and undoped polysiliconMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1989·Granted Dec 11, 1990·97 cites·2 claims
- 0378US5327012ASemiconductor device having a double-layer interconnection structureMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1992·Granted Jul 5, 1994·60 cites·11 claims
- 0472US5180436AMicrowave plasma film deposition systemMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1991·Granted Jan 19, 1993·24 cites·5 claims
- 0544US5076877AApparatus for dry etchingMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1990·Granted Dec 31, 1991·15 cites·8 claims
- 0630US5198884ASemiconductor devices having a double-layer interconnection structureMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1991·Granted Mar 30, 1993·2 cites·7 claims
- 0730US5132748ASemiconductor memory deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1991·Granted Jul 21, 1992·3 cites·14 claims
- 0829US4661830ASolid state imagerMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1984·Granted Apr 28, 1987·1 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →