Inventor · disambiguated record
Kumiko Akashika
Also filed as: AKASHIKA KUMIKO
2 granted patents·1 pending application·7 citations·filing 2003–2007
45Inventor score
Technology areasG01B
Files withDAINIPPON SCREEN MFG3
Top patents by PatentIndex Score
3 records- 0150US6937333B2Apparatus for measuring film thickness formed on object, apparatus and method of measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on objectDAINIPPON SCREEN MFG·Filed 2003·Granted Aug 30, 2005·7 cites·3 claims
- 0236US7612873B2Surface form measuring apparatus and stress measuring apparatus and surface form measuring method and stress measuring methodDAINIPPON SCREEN MFG·Filed 2007·Granted Nov 3, 2009·0 cites·20 claims
- 0333US2005006560A1Film forming apparatus and film forming methodDAINIPPON SCREEN MFG·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →