Inventor · disambiguated record
Kuan-Hui Chang
Also filed as: CHANG KUAN-HUI
2 granted patents·69 citations·filing 1996–1997
63Inventor score
Files withTAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0176US5747379AMethod of fabricating seamless tungsten plug employing tungsten redeposition and etch backTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted May 5, 1998·64 cites·23 claims
- 0228US5604134AParticle monitoring method for plasma reactors with moving gas distribution housingsTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Feb 18, 1997·5 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →