Inventor · disambiguated record
Kuang-Hui Chang
Also filed as: CHANG KUANG-HUI
6 granted patents·158 citations·filing 1995–1998
85Inventor score
Files withTAIWAN SEMICONDUCTOR MFG6
Top patents by PatentIndex Score
6 records- 0182US5746928AProcess for cleaning an electrostatic chuck of a plasma etching apparatusTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted May 5, 1998·75 cites·7 claims
- 0263US5874309AMethod for monitoring metal corrosion on integrated circuit wafersTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Feb 23, 1999·20 cites·10 claims
- 0358US5672543AVolcano defect-free tungsten plugTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Sep 30, 1997·29 cites·10 claims
- 0451US5554254APost contact layer etch back process which prevents precipitate formationTAIWAN SEMICONDUCTOR MFG·Filed 1995·Granted Sep 10, 1996·17 cites·29 claims
- 0543US5554563AIn situ hot bake treatment that prevents precipitate formation after a contact layer etch back stepTAIWAN SEMICONDUCTOR MFG·Filed 1995·Granted Sep 10, 1996·11 cites·23 claims
- 0640US6261843B1Test pattern for monitoring metal corrosion on integrated circuit wafersTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jul 17, 2001·6 cites·7 claims
Join the waitlist — get patent alerts
Get an alert when Kuang-Hui Chang files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →