Inventor · disambiguated record
Kunihiko Kasama
Also filed as: KASAMA KUNIHIKO
4 granted patents·86 citations·filing 1996–1997
77Inventor score
Files withNEC CORP4
Top patents by PatentIndex Score
4 records- 0169US5792596APattern forming methodNEC CORP·Filed 1996·Granted Aug 11, 1998·33 cites·14 claims
- 0268US5786113APhoto-mask used in aligner for exactly transferring main pattern assisted by semi-transparent auxiliary pattern and process of fabrication thereofNEC CORP·Filed 1996·Granted Jul 28, 1998·39 cites·15 claims
- 0344US6242160B1Patterning method of chemical amplification type resist film for far ultraviolet radiationNEC CORP·Filed 1997·Granted Jun 5, 2001·13 cites·17 claims
- 0427US5665519AResist materialNEC CORP·Filed 1996·Granted Sep 9, 1997·1 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →