Inventor · disambiguated record
Kuo-Chang Kau
Also filed as: KAU KUO-CHANG
11 granted patents·1 pending application·848 citations·filing 2014–2025
88Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD12
Top patents by PatentIndex Score
12 records- 0198US10018920B2Lithography patterning with a gas phase resistTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jul 10, 2018·417 cites·20 claims
- 0298US9570302B1Method of patterning a material layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Feb 14, 2017·419 cites·20 claims
- 0397US10459352B2Mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 29, 2019·10 cites·20 claims
- 0483US11921434B2Mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
- 0580US11740563B2Mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 29, 2023·0 cites·20 claims
- 0674US9607833B2System and method for photomask particle detectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 28, 2017·2 cites·19 claims
- 0773US2025259843A1Dual critical dimension patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0870US11256179B2Mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Feb 22, 2022·0 cites·20 claims
- 0967US12308233B2Dual critical dimension patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 20, 2025·0 cites·20 claims
- 1058US10514610B2Lithography patterning with a gas phase resistTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 24, 2019·0 cites·20 claims
- 1144US10685846B2Semiconductor integrated circuit fabrication with pattern-reversing processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jun 16, 2020·0 cites·19 claims
- 1238US10825684B2Material composition and methods thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Nov 3, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →