Inventor · disambiguated record
Kunihide Tachibana
Also filed as: TACHIBANA KUNIHIDE
1 granted patent·2 pending applications·0 citations·filing 2004–2008
11Inventor score
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3 records- 0136US2008207862A1Thin film formed from polycyclic alicyclic compound as precuser and production method thereofIDEMITSU KOSAN CO·Filed 2008·Application pending·0 cites
- 0234US2007037408A1Method and apparatus for plasma processingHITACHI METALS LTD·Filed 2005·Application pending·0 cites
- 0325US7648922B2Fluorocarbon film and method for forming sameUNIV KYOTO·Filed 2004·Granted Jan 19, 2010·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →