Inventor · disambiguated record
Kuo-Shu Tseng
Also filed as: TSENG KUO-SHU
27 granted patents·8 pending applications·221 citations·filing 1984–2024
95Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD18VANGUARD INT SEMICONDUCT CORP6EXCELLENCE OPTO INC3DELTA ELECTRONICS INC2TAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
35 records- 0188US6046083AGrowth enhancement of hemispherical grain silicon on a doped polysilicon storage node capacitor structure, for dynamic random access memory applicationsVANGUARD INT SEMICONDUCT CORP·Filed 1998·Granted Apr 4, 2000·85 cites·11 claims
- 0284US9968877B2Intelligent air-conditioning controlling system and intelligent controlling method for the sameDELTA ELECTRONICS INC·Filed 2015·Granted May 15, 2018·5 cites·19 claims
- 0383US11742227B2Wafer cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 29, 2023·2 cites·20 claims
- 0483US10345716B2Metrology method in reticle transportationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 9, 2019·2 cites·20 claims
- 0582US9919350B2Cup-wash device, semiconductor apparatus, and cup cleaning methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 20, 2018·3 cites·18 claims
- 0681US12087602B2Wafer cleaning methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 10, 2024·0 cites·20 claims
- 0781US2024371667A1Wafer cleaning systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0880US12059692B2Nozzle assembly for use with liquid dispensing systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 13, 2024·0 cites·20 claims
- 0980US2024359194A1Liquid dispensing system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1078US6037219AOne step in situ doped amorphous silicon layers used for selective hemispherical grain silicon formation for crown shaped capacitor applicationsVANGUARD INT SEMICONDUCT CORP·Filed 1998·Granted Mar 14, 2000·45 cites·27 claims
- 1178US2024395582A1Liquid storage for facility chemical supply systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1275US5877052AResolution of hemispherical grained silicon peeling and row-disturb problems for dynamic random access memory, stacked capacitor structuresVANGUARD INT SEMICONDUCT CORP·Filed 1998·Granted Mar 2, 1999·39 cites·27 claims
- 1374US10074547B2Photoresist nozzle device and photoresist supply systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 11, 2018·3 cites·12 claims
- 1472US10625193B2Intelligent air-conditioning controlling system and intelligent controlling method for the sameDELTA ELECTRONICS INC·Filed 2015·Granted Apr 21, 2020·1 cites·17 claims
- 1572US8215890B2Semiconductor wafer robot alignment system and methodTSENG KUO-SHU·Filed 2009·Granted Jul 10, 2012·7 cites·22 claims
- 1670US11642682B2Pipe design for prevent dripTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 9, 2023·0 cites·20 claims
- 1769US11769678B2Liquid storage for facility chemical supply systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 26, 2023·0 cites·16 claims
- 1867US10515833B2Wafer cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 24, 2019·1 cites·19 claims
- 1962US11387123B2Metrology method in wafer transportationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 2062US10361352B1High heat dissipation light emitting diode package structure having at least two light cups and lateral light emissionEXCELLENCE OPTO INC·Filed 2018·Granted Jul 23, 2019·1 cites·7 claims
- 2158US10864533B2Integrated circuit, system for and method of forming an integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 15, 2020·0 cites·20 claims
- 2253US10651066B2Metrology method in wafer transportationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 12, 2020·0 cites·20 claims
- 2351US9770092B2Brush, back surface treatment assembly and method for cleaning substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 26, 2017·0 cites·20 claims
- 2448US5882962AMethod of fabricating MOS transistor having a P+ -polysilicon gateVANGUARD INT SEMICONDUCT CORP·Filed 1996·Granted Mar 16, 1999·12 cites·6 claims
- 2547US5746512AMethod for reducing crack of polysilicon in a quartz tube and boatVANGUARD INT SEMICONDUCT CORP·Filed 1996·Granted May 5, 1998·11 cites·13 claims
- 2643US9892982B2Method for controlling exhaust flow in wafer processing moduleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Feb 13, 2018·0 cites·13 claims
- 2741US2008171647A1Low temperature cofired ceramic materialsLEE WEI-CHANG·Filed 2007·Application pending·0 cites
- 2840US8872138B2Gas delivery for uniform film properties at UV curing chamberTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Oct 28, 2014·0 cites·20 claims
- 2939US10096745B1Light emitting diode capable of generating different light colors over single waferEXCELLENCE OPTO INC·Filed 2017·Granted Oct 9, 2018·0 cites·4 claims
- 3039US2013026381A1Dynamic, real time ultraviolet radiation intensity monitorTAIWAN SEMICONDUCTOR MFG·Filed 2011·Application pending·0 cites
- 3138US4588613AProcess for reducing polymer buildupFORMOSA PLASTICS CORP·Filed 1984·Granted May 13, 1986·4 cites·24 claims
- 3232US2003054608A1Method for forming shallow trench isolation in semiconductor deviceVANGUARD INT SEMICONDUCT CORP·Filed 2001·Application pending·0 cites
- 3331US9570334B2Method and system for positioning wafer in semiconductor manufacturing fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Feb 14, 2017·0 cites·18 claims
- 3431US2018080624A1Light emitting diode array optical cup structure with focal positionEXCELLENCE OPTO INC·Filed 2016·Application pending·0 cites
- 3527US2013193350A1Wafer curing apparatus having improved shrinkageLU Yu-ying·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →