Inventor · disambiguated record
Kuang-Yung Wu
Also filed as: WU KUANG-YUNG
4 granted patents·20 citations·filing 1999–2000
72Inventor score
Files withMOSEL VITELIC INC4
Top patents by PatentIndex Score
4 records- 0151US6403489B1Method for removing polymer stacked on a lower electrode within an etching reaction chamberMOSEL VITELIC INC·Filed 2000·Granted Jun 11, 2002·3 cites·7 claims
- 0241US6299788B1Silicon etching processMOSEL VITELIC INC·Filed 1999·Granted Oct 9, 2001·10 cites·20 claims
- 0329US6113736AGas ring apparatus for semiconductor etchingMOSEL VITELIC INC·Filed 1999·Granted Sep 5, 2000·5 cites·9 claims
- 0427US6273962B1Method to reduce the particles in load-lock chamberMOSEL VITELIC INC·Filed 1999·Granted Aug 14, 2001·2 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →