Inventor · disambiguated record
Kuihyun Yoon
Also filed as: YOON KUIHYUN
6 granted patents·15 pending applications·13 citations·filing 2015–2025
70Inventor score
Files withSAMSUNG ELECTRONICS CO LTD21
Top patents by PatentIndex Score
21 records- 0188US10006872B2Optical inspection systemSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 26, 2018·13 cites·17 claims
- 0266US2025146917A1Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing waferSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 0362US12222362B2Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing waferSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Feb 11, 2025·0 cites·17 claims
- 0460US12494352B2Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Dec 9, 2025·0 cites·15 claims
- 0559US2025174443A1Substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0659US2025253128A1Substrate processing apparatus and substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0758US2025226259A1Substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0857US2025259827A1Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0957US2025379038A1Plasma etching apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1056US2025316458A1Apparatus for processing a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1155US2025226187A1Substrate processing apparatus for etching a substrate by using plasmaSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1254US12183555B2Substrate processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Dec 31, 2024·0 cites·20 claims
- 1354US2024212992A1Plasma processing apparatus and methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1454US2023317418A1Substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 1553US2024162017A1Substrate supporting device, a substrate processing apparatus including the same, and a substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1650US2024379334A1Coolant tube block assembly and semiconductor processing device including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1748US2023143327A1Focus ring, substrate processing apparatus including the same, and substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 1847US11515193B2Etching apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
- 1945US2025054733A1Apparatus for processing a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 2042US2025391695A1Substrate treatment apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 2140US10532896B2Grip apparatus and substrate inspection system including the same, and method of manufacturing semiconductor device using the substrate inspection systemSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jan 14, 2020·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Kuihyun Yoon files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →