Inventor · disambiguated record
Kwang Hwa Chung
Also filed as: CHUNG KWANG H · CHUNG KWANG HWA
8 granted patents·1 pending application·122 citations·filing 1997–2008
85Inventor score
Files withKOREA RES INST OF STANDARDS4KOREA RES INST OF STANDARDS OF1KOREA RES INST STANDARDS & SCI1KOREA RESERCH INST OF STANDARD1KOREAN RES INST OF STANDARDS A1
Top patents by PatentIndex Score
9 records- 0182US7653512B2Precision diagnostic method for the failure protection and predictive maintenance of a vacuum pump and a precision diagnostic system thereforKOREA RESERCH INST OF STANDARD·Filed 2004·Granted Jan 26, 2010·58 cites·11 claims
- 0272US5899666AIon drag vacuum pumpKOREA RES INST STANDARDS & SCI·Filed 1997·Granted May 4, 1999·32 cites·10 claims
- 0371US7664618B2Trend monitoring and diagnostic analysis method and system for failure protection and for predictive maintenance of a vacuum pumpKOREA RES INST OF STANDARDS·Filed 2004·Granted Feb 16, 2010·20 cites·11 claims
- 0446US7061184B2Plasma electron density measuring and monitoring deviceKOREA RES INST OF STANDARDS OF·Filed 2004·Granted Jun 13, 2006·9 cites·11 claims
- 0545US7716991B2Apparatus for measuring pressure using acoustic impedance variationKOREA RES INST OF STANDARDS·Filed 2008·Granted May 18, 2010·1 cites·8 claims
- 0645US7456633B2Apparatus for and method of measuring composition and pressure of the discharged gas from ion gauge using residual gas analyzerKOREAN RES INST OF STANDARDS A·Filed 2006·Granted Nov 25, 2008·2 cites·7 claims
- 0737US7228742B2Pressure measuring system for vacuum chamber using ultrasonic waveKOREA RES INST OF STANDARDS·Filed 2006·Granted Jun 12, 2007·0 cites·11 claims
- 0834US2006188646A1System and method for detecting remaining amount of precursor in vessel during CVD processYUN JU Y·Filed 2005·Application pending·0 cites
- 0932US7569178B2Apparatus and method for in-situ calibration of vacuum gauge by absolute method and comparison methodKOREA RES INST OF STANDARDS·Filed 2006·Granted Aug 4, 2009·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →