Inventor · disambiguated record
Kyung Hyun Han
Also filed as: HAN KYUNG HYUN
1 granted patent·2 pending applications·0 citations·filing 2008–2014
10Inventor score
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3 records- 0146US2008314318A1Plasma processing apparatus and method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
- 0237US2014224426A1Substrate support unit and plasma etching apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
- 0334US8062538B2Etching apparatus and method for semiconductor deviceSUNG DOUG YONG·Filed 2008·Granted Nov 22, 2011·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →