Inventor · disambiguated record
Kyuhee Han
Also filed as: HAN KYUHEE
12 granted patents·6 pending applications·34 citations·filing 2013–2024
87Inventor score
Files withSAMSUNG ELECTRONICS CO LTD15CHO NAMJIN1GLOBAL FRONTIER CT MULTISCALE ENERGY SYSTEMS1SNU R&DB FOUNDATION1
Top patents by PatentIndex Score
18 records- 0197US11515201B2Integrated circuit device including air gaps and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Nov 29, 2022·5 cites·20 claims
- 0293US11195696B2Electron beam generator, plasma processing apparatus having the same and plasma processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Dec 7, 2021·4 cites·17 claims
- 0392US10199325B2Semiconductor device and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Feb 5, 2019·14 cites·20 claims
- 0485US10347468B2Plasma processing system, electron beam generator, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jul 9, 2019·5 cites·20 claims
- 0575US11133249B2Semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Sep 28, 2021·1 cites·20 claims
- 0671US11862514B2Integrated circuit device including air gaps and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jan 2, 2024·0 cites·20 claims
- 0770US10522332B2Plasma processing system, electron beam generator, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Dec 31, 2019·1 cites·7 claims
- 0869US10381461B2Method of forming a semiconductor device with an injector having first and second outletsSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Aug 13, 2019·2 cites·7 claims
- 0963US9349976B2Process for preparing nanoparticle embedded electronic deviceSNU R&DB FOUNDATION·Filed 2013·Granted May 24, 2016·2 cites·7 claims
- 1057US2024085812A1Substrate processing apparatus, substrate processing system, and substrate processing methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1153US2025151327A1Semiconductor device and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1251US11646263B2Semiconductor device and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 9, 2023·0 cites·15 claims
- 1349US2023187178A1Gas supply module and substrate processing apparatus using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 1447US9669423B2Multi-tip spark discharge generator and method for producing nanoparticle structure using sameGLOBAL FRONTIER CT MULTISCALE ENERGY SYSTEMS·Filed 2013·Granted Jun 6, 2017·0 cites·10 claims
- 1547US2021151300A1Substrate processing apparatus and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Application pending·0 cites
- 1637US10998185B2Substrate cleaning method, substrate cleaning apparatus, and method for fabricating a semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted May 4, 2021·0 cites·13 claims
- 1737US2019096636A1Plasma processing apparatus, plasma processing method and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
- 1833US2017011904A1Film forming apparatus having an injectorCHO NAMJIN·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →