Inventor · disambiguated record
Kyungsun Kim
Also filed as: KIM KYUNGSUN
1 granted patent·16 pending applications·0 citations·filing 2023–2025
13Inventor score
Files withSAMSUNG ELECTRONICS CO LTD17
Top patents by PatentIndex Score
17 records- 0166US12476089B2Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Nov 18, 2025·0 cites·19 claims
- 0263US2025299934A1Magnetic field generation device for plasma distribution control and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0359US2025149293A1Plasma generation circuit and substrate processing device including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0459US2025337619A1Frequency and power modulation radio frequency (rf) generatorSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0558US2025218727A1Plasma generation circuit and substrate processing device including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0657US2025259827A1Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0755US2025329513A1Inductively-coupled plasma antennas for semiconductor wafer processing systemsSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 0855US2025273442A1Plasma processing deviceSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0955US2025226187A1Substrate processing apparatus for etching a substrate by using plasmaSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1053US2025239436A1Semiconductor wafer processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1151US2024234094A9Plasma control device and plasma control methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1250US2024128056A1Plasma etching apparatus and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1350US2024379334A1Coolant tube block assembly and semiconductor processing device including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1449US2025132134A1Gas supply assembly and semiconductor wafer processing apparatus using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1548US2024128054A1Plasma control apparatus and method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1645US2025054733A1Apparatus for processing a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1742US2025391695A1Substrate treatment apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →