Inventor · disambiguated record
Kyo-Woog Koo
Also filed as: KOO KYO WOOG
12 granted patents·2 pending applications·42 citations·filing 2004–2012
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
14 records- 0177US8738174B2Substrate processing apparatus and method for loading and unloading substratesYOU JAEHYUN·Filed 2011·Granted May 27, 2014·7 cites·21 claims
- 0276US8721834B2Apparatus for treating substrateKOO KYO-WOOG·Filed 2006·Granted May 13, 2014·7 cites·20 claims
- 0375US8267103B2Method and apparatus for cleaning substratesPARK KEUN-YOUNG·Filed 2007·Granted Sep 18, 2012·6 cites·27 claims
- 0475US8038838B2Spin head, method of operating the spin head and apparatus for treating substrates with the spin headSEMES CO LTD·Filed 2007·Granted Oct 18, 2011·6 cites·8 claims
- 0571US7918910B2Unit for eliminating particles and apparatus for transferring a substrate having the sameSEMES CO LTD·Filed 2008·Granted Apr 5, 2011·5 cites·17 claims
- 0669US8898926B2Substrate dryer using supercritical fluid, apparatus including the same, and method for treating substrateCHO JUNG KEUN·Filed 2007·Granted Dec 2, 2014·4 cites·8 claims
- 0769US7802579B2Apparatus and method for treating substratesSEMES CO LTD·Filed 2007·Granted Sep 28, 2010·3 cites·12 claims
- 0856US8256774B2Chucking member and spin head and method for chucking substrate using the chucking memberCHO JUNG KEUN·Filed 2007·Granted Sep 4, 2012·1 cites·11 claims
- 0946US7934513B2Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facilitySEMES CO LTD·Filed 2004·Granted May 3, 2011·3 cites·26 claims
- 1046US7900853B2Apparatus for supplying chemical liquidSEMES CO LTD·Filed 2008·Granted Mar 8, 2011·0 cites·11 claims
- 1141US7637272B2Method and apparatus for cleaning and drying substratesSEMES CO LTD·Filed 2006·Granted Dec 29, 2009·0 cites·13 claims
- 1238US8122899B2Apparatus and method for treating substrateKOO KYO-WOOG·Filed 2007·Granted Feb 28, 2012·0 cites·19 claims
- 1334US2013081658A1Apparatus and method for treating substrateSONG GIL HUN·Filed 2012·Application pending·0 cites
- 1428US2011308458A1Thin Film Deposition ApparatusSUNG BO RAMCHAN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →