Inventor · disambiguated record

Kyung Chun Lim

Also filed as: LIM KYUNG CHUN

1 granted patent·1 pending application·0 citations·filing 2008–2008

10Inventor score

Technology areasH01J H10P

Files withSAMSUNG ELECTRONICS CO LTD1 SUNG DOUG-YONG1

Top patents by PatentIndex Score

2 records

0144US2008317965A1Plasma processing apparatus and methodSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
0234US8062538B2Etching apparatus and method for semiconductor deviceSUNG DOUG YONG·Filed 2008·Granted Nov 22, 2011·0 cites·7 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →