Inventor · disambiguated record
Kyung-Sik Shim
Also filed as: SHIM KYUNG SIK
7 granted patents·4 pending applications·243 citations·filing 2000–2003
86Inventor score
Files withJUSUNG ENG CO LTD9
Top patents by PatentIndex Score
11 records- 0196US6634314B2Atomic layer deposition method and semiconductor device fabricating apparatus having rotatable gas injectorsJUSUNG ENG CO LTD·Filed 2001·Granted Oct 21, 2003·139 cites·11 claims
- 0290US6656284B1Semiconductor device manufacturing apparatus having rotatable gas injector and thin film deposition method using the sameJUSUNG ENG CO LTD·Filed 2002·Granted Dec 2, 2003·46 cites·11 claims
- 0389US6872421B2Atomic layer deposition methodJUSUNG ENG CO LTD·Filed 2003·Granted Mar 29, 2005·36 cites·9 claims
- 0473US7390366B2Apparatus for chemical vapor depositionJUSUNG ENG CO LTD·Filed 2002·Granted Jun 24, 2008·14 cites·11 claims
- 0556US6966951B2Apparatus of manufacturing a semiconductor deviceJUSUNG ENG CO LTD·Filed 2002·Granted Nov 22, 2005·3 cites·17 claims
- 0656US6660095B2Single wafer LPCVD apparatusJUSUNG ENG CO LTD·Filed 2002·Granted Dec 9, 2003·3 cites·12 claims
- 0748US6524430B1Apparatus for fabricating a semiconductor deviceJUSUNG ENG CO LTD·Filed 2000·Granted Feb 25, 2003·2 cites·5 claims
- 0840US2003116279A1Apparatus for chemical vapor depositionJUSUNG ENG CO LTD·Filed 2002·Application pending·0 cites
- 0938US2003015292A1Apparatus for fabricating a semiconductor deviceFiled 2000·Application pending·0 cites
- 1036US2003041804A1HDP-CVD apparatusJUSUNG ENG CO LTD·Filed 2002·Application pending·0 cites
- 1134US2003015142A1Apparatus for fabricating a semiconductor deviceFiled 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →