Inventor · disambiguated record

Lakshmi Nittala

Also filed as: NITTALA LAKSHMI

1 granted patent·1 pending application·286 citations·filing 2008–2014

58Inventor score

Technology areasH10P

Files withDRAEGER NERISSA1 NOVELLUS SYSTEM INC1

Top patents by PatentIndex Score

2 records

0195US8058179B1Atomic layer removal process with higher etch amountDRAEGER NERISSA·Filed 2008·Granted Nov 15, 2011·286 cites·17 claims
0252US2015118848A1Atomic layer removal process with higher etch amountNOVELLUS SYSTEM INC·Filed 2014·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →