Inventor · disambiguated record
Lars Voelkel
Also filed as: VOELKEL LARS
2 granted patents·4 pending applications·5 citations·filing 2006–2009
43Inventor score
Top patents by PatentIndex Score
6 records- 0171US7618867B2Method of forming a doped portion of a semiconductor and method of forming a transistorINFINEON TECHNOLOGIES AG·Filed 2006·Granted Nov 17, 2009·5 cites·25 claims
- 0235US2006257794A1Method for transferring structures from a photomask into a photoresist layerVOELKEL LARS·Filed 2006·Application pending·0 cites
- 0334US8633053B2Photovoltaic deviceDETJE MARTIN·Filed 2009·Granted Jan 21, 2014·0 cites·10 claims
- 0434US2009317644A1Methods for Manufacturing a Structure on a Substrate, Method for Manufacturing a Semiconductor Device and an Intermediate ProductHELLER MARCEL·Filed 2008·Application pending·0 cites
- 0534US2009311419A1Method and apparatus for resist developmentFOERSTER ANITA·Filed 2008·Application pending·0 cites
- 0629US2006290919A1Method for testing the generation of scattered light by photolithographic imaging devicesJAHNKE ANDREAS·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →