Inventor · disambiguated record
Leslie L. Deck
Also filed as: DECK LESLIE · DECK LESLIE L · DECK LESLIE LUDWIG
59 granted patents·4 pending applications·1,829 citations·filing 1987–2024
99Inventor score
Top patents by PatentIndex Score
63 records- 0198US6882432B2Frequency transform phase shifting interferometryZYGO CORP·Filed 2001·Granted Apr 19, 2005·179 cites·34 claims
- 0298US6195168B1Infrared scanning interferometry apparatus and methodZYGO CORP·Filed 2000·Granted Feb 27, 2001·180 cites·51 claims
- 0396US10591284B2Metrology of multi-layer stacksZYGO CORP·Filed 2019·Granted Mar 17, 2020·14 cites·40 claims
- 0496US5309277AHigh intensity illuminatorZYGO CORP·Filed 1992·Granted May 3, 1994·112 cites·19 claims
- 0595US7277183B2Vibration resistant interferometryZYGO CORP·Filed 2005·Granted Oct 2, 2007·34 cites·21 claims
- 0695US6924898B2Phase-shifting interferometry method and systemZYGO CORP·Filed 2002·Granted Aug 2, 2005·73 cites·65 claims
- 0795US6028670AInterferometric methods and systems using low coherence illuminationZYGO CORP·Filed 1998·Granted Feb 22, 2000·123 cites·19 claims
- 0895US5589938AMethod and apparatus for optical interferometric measurements with reduced sensitivity to vibrationZYGO CORP·Filed 1995·Granted Dec 31, 1996·126 cites·26 claims
- 0995US5402234AMethod and apparatus for the rapid acquisition of data in coherence scanning interferometryZYGO CORP·Filed 1993·Granted Mar 28, 1995·122 cites·35 claims
- 1093US8902431B2Low coherence interferometry with scan error correctionZYGO CORP·Filed 2013·Granted Dec 2, 2014·13 cites·24 claims
- 1193US8379218B2Fiber-based interferometer system for monitoring an imaging interferometerZYGO CORP·Filed 2009·Granted Feb 19, 2013·20 cites·35 claims
- 1293US8300233B2Interferometric encoder systemsDECK LESLIE L·Filed 2011·Granted Oct 30, 2012·14 cites·66 claims
- 1393US6597460B2Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datumZYGO CORP·Filed 2001·Granted Jul 22, 2003·78 cites·30 claims
- 1492US5953124AInterferometric methods and systems using low coherence illuminationZYGO CORP·Filed 1998·Granted Sep 14, 1999·95 cites·27 claims
- 1590US8045175B2Equal-path interferometerZYGO CORP·Filed 2010·Granted Oct 25, 2011·14 cites·51 claims
- 1690US7978338B2Compound reference interferometerZYGO CORP·Filed 2009·Granted Jul 12, 2011·14 cites·19 claims
- 1790US5777741AMethod and apparatus for optical interferometric measurements with reduced sensitivity to vibrationZYGO CORP·Filed 1996·Granted Jul 7, 1998·74 cites·30 claims
- 1889US7321430B2Vibration resistant interferometryZYGO CORP·Filed 2005·Granted Jan 22, 2008·18 cites·26 claims
- 1988US6717680B1Apparatus and method for phase-shifting interferometryZYGO CORP·Filed 2002·Granted Apr 6, 2004·39 cites·57 claims
- 2088US5784164AMethod and apparatus for automatically and simultaneously determining best focus and orientation of objects to be measured by broad-band interferometric meansZYGO CORP·Filed 1997·Granted Jul 21, 1998·78 cites·22 claims
- 2188US4864515AElectronic sensing screen for measuring projectile parametersHONEYWELL INC·Filed 1987·Granted Sep 5, 1989·53 cites·35 claims
- 2287US7636166B2Interferometer system for monitoring an objectZYGO CORP·Filed 2007·Granted Dec 22, 2009·14 cites·67 claims
- 2386US7564568B2Phase shifting interferometry with multiple accumulationZYGO CORP·Filed 2007·Granted Jul 21, 2009·14 cites·35 claims
- 2485US8120781B2Interferometric systems and methods featuring spectral analysis of unevenly sampled dataLIESENER JAN·Filed 2009·Granted Feb 21, 2012·11 cites·26 claims
- 2584US8004688B2Scan error correction in low coherence scanning interferometryZYGO CORP·Filed 2009·Granted Aug 23, 2011·9 cites·41 claims
- 2683US10962348B2Method and apparatus for optimizing the optical performance of interferometersZYGO CORP·Filed 2019·Granted Mar 30, 2021·1 cites·21 claims
- 2781US7826064B2Interferometer system for monitoring an objectZYGO CORP·Filed 2009·Granted Nov 2, 2010·8 cites·28 claims
- 2880US7639367B2Interferometer system for monitoring an objectZYGO CORP·Filed 2008·Granted Dec 29, 2009·9 cites·35 claims
- 2978US5568003AMethod and apparatus for producing repeatable motion from biased piezoelectric transducersZYGO CORP·Filed 1994·Granted Oct 22, 1996·31 cites·24 claims
- 3077US8988690B2Interferometric encoder systemsZYGO CORP·Filed 2013·Granted Mar 24, 2015·2 cites·23 claims
- 3177US7796273B2Phase-shifting interferometry in the presence of vibrationZYGO CORP·Filed 2008·Granted Sep 14, 2010·7 cites·30 claims
- 3275US6643024B2Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometerZYGO CORP·Filed 2001·Granted Nov 4, 2003·24 cites·14 claims
- 3374US8670127B2Interferometric encoder systemsDECK LESLIE L·Filed 2011·Granted Mar 11, 2014·2 cites·20 claims
- 3474US6894788B2Interferometric system for automated radius of curvature measurementsZYGO CORP·Filed 2001·Granted May 17, 2005·19 cites·32 claims
- 3574US5600441AInterferometer and method for measuring the distance of an object surface with respect to the surface of a rotating diskZYGO CORP·Filed 1995·Granted Feb 4, 1997·28 cites·22 claims
- 3673US10890428B2Interferometric method and apparatus using calibration information relating a focus setting to a test object positionZYGO CORP·Filed 2017·Granted Jan 12, 2021·1 cites·20 claims
- 3773US5208451AMethod and apparatus for automated focusing of an interferometric optical systemZYGO CORP·Filed 1992·Granted May 4, 1993·33 cites·38 claims
- 3872US6744522B2Interferometer for measuring the thickness profile of thin transparent substratesZYGO CORP·Filed 2002·Granted Jun 1, 2004·17 cites·13 claims
- 3970US10190871B2Precision positioning system using a wavelength tunable laserZYGO CORP·Filed 2017·Granted Jan 29, 2019·1 cites·22 claims
- 4070US7327469B2Method for compensating errors in interferometric surface metrologyZYGO CORP·Filed 2005·Granted Feb 5, 2008·6 cites·28 claims
- 4168US10267617B2Method and apparatus for optimizing the optical performance of interferometersZYGO CORP·Filed 2016·Granted Apr 23, 2019·1 cites·39 claims
- 4268US5999263AMethod and apparatus for performing interferometric measurements with reduced sensitivity to vibrationZYGO CORP·Filed 1998·Granted Dec 7, 1999·30 cites·25 claims
- 4367US12305980B2Optical contact metrologyZYGO CORP·Filed 2022·Granted May 20, 2025·0 cites·45 claims
- 4466US7030995B2Apparatus and method for mechanical phase shifting interferometryZYGO CORP·Filed 2002·Granted Apr 18, 2006·12 cites·20 claims
- 4565US4870290AObject motion sensing and measuring apparatus using position sensing detectorsHONEYWELL INC·Filed 1988·Granted Sep 26, 1989·17 cites·15 claims
- 4663US6806965B2Wavefront and intensity analyzer for collimated beamsZYGO CORP·Filed 2002·Granted Oct 19, 2004·9 cites·23 claims
- 4763US6788422B2Method and apparatus for using quasi-stable light sources in interferometry applicationsZYGO CORP·Filed 2002·Granted Sep 7, 2004·10 cites·23 claims
- 4862US7948639B2Phase-shifting interferometry in the presence of vibrationZYGO CORP·Filed 2010·Granted May 24, 2011·1 cites·20 claims
- 4961US6995848B2Method and apparatus for calibrating a wavelength-tuning interferometerZYGO CORP·Filed 2002·Granted Feb 7, 2006·9 cites·65 claims
- 5060US7796275B2Phase-shifting interferometry in the presence of vibration using phase biasZYGO CORP·Filed 2008·Granted Sep 14, 2010·2 cites·20 claims
Showing the top 50 of 63 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →