Inventor · disambiguated record
Lilin Chang
Also filed as: Chang Lilin
3 granted patents·7 pending applications·5 citations·filing 2014–2025
58Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD10
Top patents by PatentIndex Score
10 records- 0188US9645497B2Lithography patterning techniqueTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted May 9, 2017·5 cites·20 claims
- 0277US2025359292A1Gate Patterning for Stacked Device StructureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0376US2025349535A1Semiconductor Device Having Dielectric Material Treated with Microwave Plasma and Method of Fabricating ThereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0475US2025351547A1Semiconductor Device and Method of Fabricating ThereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0569US2025140553A1Semiconductor Device Having Dielectric Material Treated with Microwave Plasma and Method of Fabricating ThereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0668US2025159966A1Semiconductor Device and Method of Fabricating ThereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0768US2024321640A1Gate Patterning for Stacked Device StructureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0865US11774855B2Lithography patterning techniqueTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 3, 2023·0 cites·20 claims
- 0958US10539878B2Lithography patterning techniqueTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 21, 2020·0 cites·20 claims
- 1050US2023350302A1Polymer crosslink de-crosslink processes for resist patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →