Inventor · disambiguated record
Linghan Shen
Also filed as: Shen Linghan
5 granted patents·1 pending application·0 citations·filing 2019–2021
57Inventor score
Top patents by PatentIndex Score
6 records- 0149US12194592B2Polishing and loading/unloading component moduleHANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC·Filed 2021·Granted Jan 14, 2025·0 cites·4 claims
- 0243US11961749B2Wafer detection device and wafer detection method using the sameHANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC·Filed 2020·Granted Apr 16, 2024·0 cites·16 claims
- 0340US11908720B2CMP wafer cleaning equipment, wafer transfer robot and wafer flipping methodHANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC·Filed 2019·Granted Feb 20, 2024·0 cites·17 claims
- 0439US12482674B2Wafer cleaning and drying deviceHANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC·Filed 2020·Granted Nov 25, 2025·0 cites·4 claims
- 0538US2023245915A1Wafer transfer device, wafer transfer method and cleaning module of chemical mechanical planarization machineHANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC·Filed 2020·Application pending·0 cites
- 0637US12103134B2Wafer loading bracket, wafer loading system, and wafer mounting method for CMP processHANGZHOU ZHONGGUI ELECTRONIC TECH CO LTD·Filed 2019·Granted Oct 1, 2024·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →