Inventor · disambiguated record
Lin-Hung Shiu
Also filed as: SHIU LIN-HUNG
3 granted patents·1 pending application·1 citations·filing 2006–2016
47Inventor score
Top patents by PatentIndex Score
4 records- 0166US10101659B2Lithography method with surface modification layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Oct 16, 2018·1 cites·21 claims
- 0244US7675604B2Hood for immersion lithographyTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Mar 9, 2010·0 cites·20 claims
- 0344US7666576B2Exposure scan and step direction optimizationTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Feb 23, 2010·0 cites·19 claims
- 0439US2008020324A1Immersion lithography defect reduction with top coater removalTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →