Inventor · disambiguated record
Lianqing Zhang
Also filed as: ZHANG LIANQING
1 granted patent·1 pending application·8 citations·filing 2011–2011
29Inventor score
Files withLU XINCHUN2
Top patents by PatentIndex Score
2 records- 0178US9138857B2Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the sameLU XINCHUN·Filed 2011·Granted Sep 22, 2015·8 cites·14 claims
- 0228US2013273819A1Wafer transfer device for chemical mechanical polishing apparatusLU XINCHUN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →