Inventor · disambiguated record
Luciana Meli Thompson
Also filed as: MELI THOMPSON LUCIANA
8 granted patents·1 pending application·19 citations·filing 2017–2019
79Inventor score
Files withIBM9
Top patents by PatentIndex Score
9 records- 0193US10879107B2Method of forming barrier free contact for metal interconnectsIBM·Filed 2018·Granted Dec 29, 2020·14 cites·20 claims
- 0288US10274836B2Determination of lithography effective dose uniformityIBM·Filed 2017·Granted Apr 30, 2019·3 cites·13 claims
- 0377US10281826B2Determination of lithography effective dose uniformityIBM·Filed 2017·Granted May 7, 2019·1 cites·7 claims
- 0471US10615037B2Tone reversal during EUV pattern transfer using surface active layer assisted selective depositionIBM·Filed 2018·Granted Apr 7, 2020·1 cites·16 claims
- 0551US11681213B2EUV pattern transfer using graded hardmaskIBM·Filed 2019·Granted Jun 20, 2023·0 cites·19 claims
- 0648US11300881B2Line break repairing layer for extreme ultraviolet patterning stacksIBM·Filed 2018·Granted Apr 12, 2022·0 cites·20 claims
- 0748US10578981B2Post-lithography defect inspection using an e-beam inspection toolIBM·Filed 2018·Granted Mar 3, 2020·0 cites·15 claims
- 0847US10539884B2Post-lithography defect inspection using an e-beam inspection toolIBM·Filed 2018·Granted Jan 21, 2020·0 cites·20 claims
- 0939US2019101829A1Photoresist patterning on silicon nitrideIBM·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →