Inventor · disambiguated record
Lung Tsai
Also filed as: TSAI LUNG HUI
2 granted patents·2 pending applications·0 citations·filing 2001–2001
24Inventor score
Technology areasH10P
Files withSILICON INTEGRATED SYS CORP2
Top patents by PatentIndex Score
4 records- 0132US6596088B2Method for removing the circumferential edge of a dielectric layerSILICON INTEGRATED SYS CORP·Filed 2001·Granted Jul 22, 2003·0 cites·15 claims
- 0230US6561204B2Apparatus and method for cleaning wafers with contact holes or via holesSILICON INTEGRATED SYS CORP·Filed 2001·Granted May 13, 2003·0 cites·5 claims
- 0317US2003047194A1Apparatus and method for cleaning wafersFiled 2001·Application pending·0 cites
- 0417US2002178603A1Wafer drying apparatus using isopropanolFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →