Inventor · disambiguated record
Lukas Urban
Also filed as: URBAN LUKAS
5 granted patents·4 pending applications·16 citations·filing 2012–2018
73Inventor score
Top patents by PatentIndex Score
9 records- 0190US11248295B2Wafer carrier having retention pockets with compound radii for chemical vapor deposition systemsVEECO INSTR INC·Filed 2018·Granted Feb 15, 2022·3 cites·10 claims
- 0290US10145013B2Wafer carrier having retention pockets with compound radii for chemical vapor desposition systemsVEECO INSTR INC·Filed 2015·Granted Dec 4, 2018·4 cites·13 claims
- 0381US10782676B2Work cell for a production robotBENTELER MASCHB GMBH·Filed 2018·Granted Sep 22, 2020·7 cites·16 claims
- 0464US10167571B2Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systemsVEECO INSTR INC·Filed 2013·Granted Jan 1, 2019·2 cites·20 claims
- 0549US2013298831A1Automated process chamber cleaning in material deposition systemsSHAMOUN BASSAM·Filed 2012·Application pending·0 cites
- 0637US2013065403A1Wafer carrier with thermal featuresPARANJPE AJIT·Filed 2012·Application pending·0 cites
- 0736US10316412B2Wafter carrier for chemical vapor deposition systemsKRISHNAN SANDEEP·Filed 2012·Granted Jun 11, 2019·0 cites·32 claims
- 0836US2017076972A1Planetary wafer carriersVEECO INSTR INC·Filed 2016·Application pending·0 cites
- 0934US2017053049A1Process-specific wafer carrier correction to improve thermal uniformity in chemical vapor deposition systems and processesVEECO INSTR INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →