Inventor · disambiguated record
Lynn David Bollinger
Also filed as: BOLLINGER LYNN D · BOLLINGER LYNN DAVID
7 granted patents·172 citations·filing 1993–2005
86Inventor score
Top patents by PatentIndex Score
7 records- 0182US5375064AMethod and apparatus for moving a material removal tool with low tool accelerationsHUGHES AIRCRAFT CO·Filed 1993·Granted Dec 20, 1994·71 cites·11 claims
- 0281US6467297B1Wafer holder for rotating and translating wafersJETEK INC·Filed 2000·Granted Oct 22, 2002·30 cites·11 claims
- 0368US6762136B1Method for rapid thermal processing of substratesJETEK INC·Filed 2000·Granted Jul 13, 2004·14 cites·22 claims
- 0464US6955991B2Atmospheric process and system for controlled and rapid removal of polymers from high depth to width aspect ratio holesJETEK INC·Filed 2003·Granted Oct 18, 2005·10 cites·12 claims
- 0562US6492613B2System for precision control of the position of an atmospheric plasmaJETEK INC·Filed 2001·Granted Dec 10, 2002·16 cites·17 claims
- 0658US5364496AHighly durable noncontaminating surround materials for plasma etchingHUGHES AIRCRAFT CO·Filed 1993·Granted Nov 15, 1994·31 cites·18 claims
- 0736US7365019B2Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holesJETEK LLC·Filed 2005·Granted Apr 29, 2008·0 cites·28 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →