Inventor · disambiguated record
Marc Aho
Also filed as: AHO MARC · AHO MARC T
9 granted patents·1 pending application·50 citations·filing 2003–2008
85Inventor score
Files withN & K TECHNOLOGY INC9
Top patents by PatentIndex Score
10 records- 0182US7962242B1Automated spatial flipping apparatus and system for photomasks and photomasks with pelliclesN & K TECHNOLOGY INC·Filed 2008·Granted Jun 14, 2011·8 cites·37 claims
- 0277US7397554B1Apparatus and method for examining a disk-shaped sample on an X-Y-theta stageN & K TECHNOLOGY INC·Filed 2006·Granted Jul 8, 2008·6 cites·23 claims
- 0377US7349103B1System and method for high intensity small spot optical metrologyN & K TECHNOLOGY INC·Filed 2005·Granted Mar 25, 2008·10 cites·30 claims
- 0470US7717661B1Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transferN & K TECHNOLOGY INC·Filed 2006·Granted May 18, 2010·5 cites·12 claims
- 0567US7248364B2Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot sizeN & K TECHNOLOGY INC·Filed 2003·Granted Jul 24, 2007·11 cites·34 claims
- 0661US7616301B2Disc clamping device for multiple standard discsN & K TECHNOLOGY INC·Filed 2004·Granted Nov 10, 2009·5 cites·19 claims
- 0755US7327457B2Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changesN & K TECHNOLOGY INC·Filed 2003·Granted Feb 5, 2008·5 cites·34 claims
- 0848US7679736B1System and method for optical photomask inspection through pellicleN & K TECHNOLOGY INC·Filed 2008·Granted Mar 16, 2010·0 cites·12 claims
- 0945US7330256B1Spectrophotometric system with reduced angle of incidenceN & K TECHNOLOGY INC·Filed 2005·Granted Feb 12, 2008·0 cites·5 claims
- 1034US2005111944A1Compact wafer handling system with single axis robotic arm and prealigner-cassette elevatorFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →