Inventor · disambiguated record
Masaya Asai
Also filed as: ASAI MASAYA
20 granted patents·1 pending application·30 citations·filing 1997–2024
90Inventor score
Top patents by PatentIndex Score
21 records- 0185US11986853B2Substrate processing apparatus, film formation unit, substrate processing method and film formation methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted May 21, 2024·1 cites·11 claims
- 0282US10591820B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Mar 17, 2020·3 cites·18 claims
- 0378US11004702B2Film processing unit and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Granted May 11, 2021·2 cites·13 claims
- 0476US11107698B2Substrate treating methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 31, 2021·2 cites·5 claims
- 0569US10832925B2Thermal processing device, substrate processing apparatus, thermal processing method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Nov 10, 2020·1 cites·8 claims
- 0668US12508623B2Substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2024·Granted Dec 30, 2025·0 cites·11 claims
- 0768US11243469B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Feb 8, 2022·1 cites·7 claims
- 0868US10854480B2Film processing unit, substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted Dec 1, 2020·1 cites·12 claims
- 0963US12119242B2Film processing methodSCREEN HOLDINGS CO LTD·Filed 2021·Granted Oct 15, 2024·0 cites·15 claims
- 1054US6053058AAtmosphere concentration monitoring for substrate processing apparatus and life determination for atmosphere processing unit of substrate processing apparatusDAINIPPON SCREEN MFG·Filed 1997·Granted Apr 25, 2000·19 cites·7 claims
- 1148US2018147599A1Substrate processing apparatus, film formation unit, substrate processing method and film formation methodSCREEN HOLDINGS CO LTD·Filed 2016·Application pending·0 cites
- 1247US10395942B2Etching device, substrate processing apparatus, etching method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 27, 2019·0 cites·14 claims
- 1346US10941492B2Substrate treating methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Mar 9, 2021·0 cites·20 claims
- 1444US10539877B2Developing methodSCREEN HOLDINGS CO LTD·Filed 2019·Granted Jan 21, 2020·0 cites·7 claims
- 1543US11281108B2Exposure deviceSCREEN HOLDINGS CO LTD·Filed 2020·Granted Mar 22, 2022·0 cites·9 claims
- 1643US10955745B2Exposure device, substrate processing apparatus, exposure method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Mar 23, 2021·0 cites·22 claims
- 1743US10754251B2Development unit, substrate processing apparatus, development method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 25, 2020·0 cites·18 claims
- 1843US10444636B2Exposure device substrate processing apparatus, exposure method of substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Oct 15, 2019·0 cites·15 claims
- 1941US10900126B2Substrate treating method and apparatus used thereforSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jan 26, 2021·0 cites·10 claims
- 2038US10401736B2Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 3, 2019·0 cites·16 claims
- 2137US10331034B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted Jun 25, 2019·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →