Inventor · disambiguated record

Marcel C. M. Baggen

Also filed as: BAGGEN MARCEL C M

1 granted patent·68 citations·filing 1991–1991

51Inventor score

Technology areasH10P

Files withPHILIPS CORP1

Top patents by PatentIndex Score

1 record

0176US5204712ASupport device with a tiltable object table, and optical lithographic device provided with such a support devicePHILIPS CORP·Filed 1991·Granted Apr 20, 1993·68 cites·33 claims

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