Inventor · disambiguated record
Mark S. Chang
Also filed as: CHANG MARK · CHANG MARK S
68 granted patents·2 pending applications·2,052 citations·filing 1981–2012
99Inventor score
Top patents by PatentIndex Score
70 records- 0198US5635423ASimplified dual damascene process for multi-level metallization and interconnection structureADVANCED MICRO DEVICES INC·Filed 1994·Granted Jun 3, 1997·374 cites·13 claims
- 0295US5550405AProcessing techniques for achieving production-worthy, low dielectric, low interconnect resistance and high performance ICSADVANCED MICRO DEVICES INC·Filed 1994·Granted Aug 27, 1996·149 cites·10 claims
- 0394US6509232B1Formation of STI (shallow trench isolation) structures within core and periphery areas of flash memory deviceADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 21, 2003·65 cites·20 claims
- 0494US5679608AProcessing techniques for achieving production-worthy, low dielectric, low dielectric, low interconnect resistance and high performance ICADVANCED MICRO DEVICES INC·Filed 1995·Granted Oct 21, 1997·140 cites·16 claims
- 0594US5559055AMethod of decreased interlayer dielectric constant in a multilayer interconnect structure to increase device speed performanceADVANCED MICRO DEVICES INC·Filed 1994·Granted Sep 24, 1996·173 cites·17 claims
- 0693US4370405AMultilayer photoresist process utilizing an absorbant dyeHEWLETT PACKARD CO·Filed 1981·Granted Jan 25, 1983·136 cites·3 claims
- 0792US6750127B1Method for fabricating a semiconductor device using amorphous carbon having improved etch resistanceADVANCED MICRO DEVICES INC·Filed 2003·Granted Jun 15, 2004·61 cites·9 claims
- 0891US6764949B2Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabricationADVANCED MICRO DEVICES INC·Filed 2002·Granted Jul 20, 2004·53 cites·18 claims
- 0990US6825060B1Photosensitive polymeric memory elementsADVANCED MICRO DEVICES INC·Filed 2003·Granted Nov 30, 2004·55 cites·20 claims
- 1090US6787458B1Polymer memory device formed in via openingADVANCED MICRO DEVICES INC·Filed 2003·Granted Sep 7, 2004·63 cites·20 claims
- 1190US6773954B1Methods of forming passive layers in organic memory cellsADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 10, 2004·62 cites·23 claims
- 1290US6753247B1Method(s) facilitating formation of memory cell(s) and patterned conductiveADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 22, 2004·53 cites·26 claims
- 1388US6642148B1RELACS shrink method applied for single print resist mask for LDD or buried bitline implants using chemically amplified DUV type photoresistADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 4, 2003·46 cites·16 claims
- 1487US8035153B2Self-aligned patterning method by using non-conformal film and etch for flash memory and other semiconductor applicationsSPANSION LLC·Filed 2010·Granted Oct 11, 2011·9 cites·27 claims
- 1586US6420752B1Semiconductor device with self-aligned contacts using a liner oxide layerADVANCED MICRO DEVICES INC·Filed 2000·Granted Jul 16, 2002·37 cites·7 claims
- 1685US6864556B1CVD organic polymer film for advanced gate patterningADVANCED MICRO DEVICES INC·Filed 2002·Granted Mar 8, 2005·30 cites·18 claims
- 1782US6878961B2Photosensitive polymeric memory elementsADVANCED MICRO DEVICES INC·Filed 2004·Granted Apr 12, 2005·27 cites·20 claims
- 1880US6475847B1Method for forming a semiconductor device with self-aligned contacts using a liner oxide layerADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 5, 2002·26 cites·17 claims
- 1979US6797552B1Method for defect reduction and enhanced control over critical dimensions and profiles in semiconductor devicesADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 28, 2004·22 cites·8 claims
- 2079US5907781AProcess for fabricating an integrated circuit with a self-aligned contactADVANCED MICRO DEVICES INC·Filed 1998·Granted May 25, 1999·59 cites·20 claims
- 2178US6400030B1Self-aligning vias for semiconductorsADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 4, 2002·21 cites·10 claims
- 2277US7256141B1Interface layer between dual polycrystalline silicon layersSPANSION LLC·Filed 2005·Granted Aug 14, 2007·5 cites·11 claims
- 2377US6436766B1Process for fabricating high density memory cells using a polysilicon hard maskADVANCED MICRO DEVICES INC·Filed 1999·Granted Aug 20, 2002·36 cites·22 claims
- 2476US7015504B2Sidewall formation for high density polymer memory element arrayADVANCED MICRO DEVICES INC·Filed 2003·Granted Mar 21, 2006·22 cites·22 claims
- 2571US7732276B2Self-aligned patterning method by using non-conformal film and etch back for flash memory and other semiconductor applicationsSPANSION LLC·Filed 2007·Granted Jun 8, 2010·4 cites·20 claims
- 2670US5965934AProcessing techniques for achieving production-worthy, low dielectric, low interconnect resistance and high performance ICSADVANCED MICRO DEVICES INC·Filed 1996·Granted Oct 12, 1999·29 cites·9 claims
- 2769US6815292B1Flash memory having improved core field isolation in select gate regionsADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 9, 2004·11 cites·4 claims
- 2868US6836398B1System and method of forming a passive layer by a CMP processADVANCED MICRO DEVICES INC·Filed 2002·Granted Dec 28, 2004·11 cites·19 claims
- 2967US6727195B2Method and system for decreasing the spaces between wordlinesADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 27, 2004·14 cites·11 claims
- 3066US7361588B2Etch process for CD reduction of arc materialADVANCED MICRO DEVICES INC·Filed 2005·Granted Apr 22, 2008·2 cites·20 claims
- 3166US6638358B1Method and system for processing a semiconductor deviceADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 28, 2003·10 cites·3 claims
- 3265US6444539B1Method for producing a shallow trench isolation filled with thermal oxideADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 3, 2002·10 cites·15 claims
- 3364US7691751B2Selective silicide formation using resist etchbackSPANSION LLC·Filed 2007·Granted Apr 6, 2010·2 cites·20 claims
- 3463US7622389B1Selective contact formation using masking and resist patterning techniquesSPANSION LLC·Filed 2006·Granted Nov 24, 2009·2 cites·20 claims
- 3561US6900488B1Multi-cell organic memory element and methods of operating and fabricatingADVANCED MICRO DEVICES INC·Filed 2002·Granted May 31, 2005·11 cites·31 claims
- 3661US6806165B1Isolation trench fill processADVANCED MICRO DEVICES INC·Filed 2002·Granted Oct 19, 2004·9 cites·9 claims
- 3760US6610580B1Flash memory array and a method and system of fabrication thereofADVANCED MICRO DEVICES INC·Filed 2000·Granted Aug 26, 2003·11 cites·6 claims
- 3857US6566230B1Shallow trench isolation spacer for weff improvementADVANCED MICRO DEVICES INC·Filed 2001·Granted May 20, 2003·7 cites·10 claims
- 3957US6399446B1Process for fabricating high density memory cells using a metallic hard maskADVANCED MICRO DEVICES INC·Filed 1999·Granted Jun 4, 2002·21 cites·24 claims
- 4057US6200884B1Method for shaping photoresist mask to improve high aspect ratio ion implantationADVANCED MICRO DEVICES INC·Filed 1999·Granted Mar 13, 2001·20 cites·16 claims
- 4156US6515328B1Semiconductor devices with reduced control gate dimensionsADVANCED MICRO DEVICES INC·Filed 1999·Granted Feb 4, 2003·20 cites·10 claims
- 4255US6812077B1Method for patterning narrow gate linesADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 2, 2004·6 cites·5 claims
- 4354US8815727B2Integrated circuit with metal and semi-conducting gateADVANCED MICRO DEVICES INC·Filed 2012·Granted Aug 26, 2014·0 cites·20 claims
- 4453US6472327B2Method and system for etching tunnel oxide to reduce undercutting during memory array fabricationADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 29, 2002·6 cites·1 claims
- 4553US6232646B1Shallow trench isolation filled with thermal oxideADVANCED MICRO DEVICES INC·Filed 1998·Granted May 15, 2001·19 cites·2 claims
- 4652US6431182B1Plasma treatment for polymer removal after via etchADVANCED MICRO DEVICES INC·Filed 1999·Granted Aug 13, 2002·17 cites·21 claims
- 4751US7439141B2Shallow trench isolation approach for improved STI corner roundingSPANSION LLC·Filed 2002·Granted Oct 21, 2008·4 cites·8 claims
- 4851US6979619B1Flash memory device and a method of fabrication thereofADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 27, 2005·4 cites·4 claims
- 4951US5945352AMethod for fabrication of shallow isolation trenches with sloped wall profilesADVANCED MICRO DEVICES INC·Filed 1997·Granted Aug 31, 1999·16 cites·12 claims
- 5050US8507969B2Method and system for providing contact to a first polysilicon layer in a flash memory deviceCHANG MARK S·Filed 2012·Granted Aug 13, 2013·0 cites·12 claims
Showing the top 50 of 70 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →