Inventor · disambiguated record
Masaichi Eda
Also filed as: EDA MASAICHI
7 granted patents·82 citations·filing 2001–2019
84Inventor score
Top patents by PatentIndex Score
7 records- 0174US6713386B1Method of preventing resist poisoning in dual damascene structuresLSI LOGIC CORP·Filed 2001·Granted Mar 30, 2004·17 cites·4 claims
- 0272US6794304B1Method and apparatus for reducing microtrenching for borderless vias created in a dual damascene processLSI LOGIC CORP·Filed 2003·Granted Sep 21, 2004·22 cites·20 claims
- 0372US6743725B1High selectivity SiC etch in integrated circuit fabricationLSI LOGIC CORP·Filed 2001·Granted Jun 1, 2004·18 cites·11 claims
- 0469US11049956B2Method of forming a semiconductor deviceSEMICONDUCTOR COMPONENTS IND LLC·Filed 2019·Granted Jun 29, 2021·1 cites·20 claims
- 0562US6686272B1Anti-reflective coatings for use at 248 nm and 193 nmLSI LOGIC CORP·Filed 2001·Granted Feb 3, 2004·20 cites·11 claims
- 0654US7094687B1Reduced dry etching lagLSI LOGIC CORP·Filed 2005·Granted Aug 22, 2006·1 cites·17 claims
- 0751US6969683B2Method of preventing resist poisoning in dual damascene structuresLSI LOGIC CORP·Filed 2003·Granted Nov 29, 2005·3 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →