Inventor · disambiguated record
Masahiko Egashira
Also filed as: EGASHIRA MASAHIKO
3 granted patents·2 citations·filing 2016–2018
52Inventor score
Files withSUMCO CORP3
Top patents by PatentIndex Score
3 records- 0165US10718722B2Method of inspecting back surface of epitaxial wafer, epitaxial wafer back surface inspection apparatus, method of managing lift pin of epitaxial growth apparatus, and method of producing epitaxial waferSUMCO CORP·Filed 2018·Granted Jul 21, 2020·1 cites·14 claims
- 0263US10338005B2Apparatus for inspecting back surface of epitaxial wafer and method of inspecting back surface of epitaxial wafer using the sameSUMCO CORP·Filed 2016·Granted Jul 2, 2019·1 cites·9 claims
- 0334US10161883B2Wafer inspection method and wafer inspection apparatusSUMCO CORP·Filed 2016·Granted Dec 25, 2018·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →