Inventor · disambiguated record
Makita Erni
Also filed as: ERNI MAKITA
0 granted patents·3 pending applications·0 citations·filing 2024–2025
Technology areasH01J
Files withAXCELIS TECH INC3
Top patents by PatentIndex Score
3 records- 0163US2025188592A1High-efficiency target for an ion sourceAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 0259US2025308842A1Semiconductor electrical insulator with reduced arcingAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 0358US2025379023A1Granular sputter source target with repeller cup and method for use thereofAXCELIS TECH INC·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →