Inventor · disambiguated record
Matthew C. Farrell
Also filed as: FARRELL MATTHEW C
2 granted patents·1 pending application·2 citations·filing 2013–2019
34Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0155US9869021B2Showerhead apparatus for a linear batch chemical vapor deposition systemAVENTA TECH INC·Filed 2013·Granted Jan 16, 2018·2 cites·17 claims
- 0239US10153134B1Plasma generation systemNISSIN ION EQUIPMENT CO LTD·Filed 2018·Granted Dec 11, 2018·0 cites·22 claims
- 0338US2020294819A1Systems and Methods for Substrate CoolingNISSIN ION EQUIPMENT CO LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →