Inventor · disambiguated record
Makoto Furuno
Also filed as: FURUNO MAKOTO
43 granted patents·2 pending applications·536 citations·filing 1997–2017
98Inventor score
Top patents by PatentIndex Score
45 records- 0196US8263421B2Manufacturing method of semiconductor deviceYAMAZAKI SHUNPEI·Filed 2010·Granted Sep 11, 2012·26 cites·15 claims
- 0296US7833845B2Manufacturing method of semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2008·Granted Nov 16, 2010·42 cites·21 claims
- 0396US7611930B2Method of manufacturing display deviceSEMICONDUCTOR ENERGY LAB·Filed 2008·Granted Nov 3, 2009·42 cites·22 claims
- 0496US7511709B2Display deviceSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted Mar 31, 2009·101 cites·20 claims
- 0595US8395158B2Thin film transistor having microcrystalline semiconductor layerYAMAZAKI SHUNPEI·Filed 2011·Granted Mar 12, 2013·17 cites·22 claims
- 0692US8518761B2Deposition method and method for manufacturing semiconductor deviceYAMAZAKI SHUNPEI·Filed 2011·Granted Aug 27, 2013·9 cites·22 claims
- 0791US7638408B2Manufacturing method of substrate provided with semiconductor filmsSEMICONDUCTOR ENERGY LAB·Filed 2008·Granted Dec 29, 2009·19 cites·15 claims
- 0890US8310474B2Display deviceKOYAMA JUN·Filed 2009·Granted Nov 13, 2012·15 cites·18 claims
- 0990US8198629B2Photoelectric conversion device and method for manufacturing the sameYAMAZAKI SHUNPEI·Filed 2011·Granted Jun 12, 2012·7 cites·18 claims
- 1090US7888167B2Photoelectric conversion device and method for manufacturing the sameSEMICONDUCTOR ENERGY LAB·Filed 2009·Granted Feb 15, 2011·12 cites·8 claims
- 1190US7572688B2Method for manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2007·Granted Aug 11, 2009·15 cites·39 claims
- 1289US8987068B2Method for manufacturing display deviceSEMICONDUCTOR ENERGY LAB·Filed 2013·Granted Mar 24, 2015·7 cites·23 claims
- 1389US8101444B2Method for manufacturing semiconductor deviceYAMAZAKI SHUNPEI·Filed 2008·Granted Jan 24, 2012·12 cites·12 claims
- 1489US8017946B2Thin film transistor having microcrystalline semiconductor layer and amorphous semiconductor layerSEMICONDUCTOR ENERGY LAB·Filed 2008·Granted Sep 13, 2011·14 cites·18 claims
- 1588US8629442B2Display deviceYAMAZAKI SHUNPEI·Filed 2011·Granted Jan 14, 2014·7 cites·26 claims
- 1688US7229862B2Method for manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted Jun 12, 2007·37 cites·32 claims
- 1787US7842992B2Nonvolatile semiconductor memory device having floating gate that includes two layersSEMICONDUCTOR ENERGY LAB·Filed 2007·Granted Nov 30, 2010·14 cites·40 claims
- 1886US7786526B2Nonvolatile semiconductor memory deviceSEMICONDUCTOR ENERGY LAB·Filed 2007·Granted Aug 31, 2010·12 cites·15 claims
- 1985US8022460B2Nonvolatile semiconductor memory deviceSEMICONDUCTOR ENERGY LAB·Filed 2007·Granted Sep 20, 2011·12 cites·32 claims
- 2084US7477216B2Display device and electronic apparatusSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted Jan 13, 2009·25 cites·40 claims
- 2183US8455044B2Semiconductor film, method for manufacturing the same, and power storage deviceYOKOI TOMOKAZU·Filed 2011·Granted Jun 4, 2013·6 cites·24 claims
- 2281US7709843B2Display device and method for manufacturing the same, and television receiverSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted May 4, 2010·27 cites·9 claims
- 2378US8729620B2Nonvolatile semiconductor memory deviceYAMAZAKI SHUNPEI·Filed 2007·Granted May 20, 2014·7 cites·31 claims
- 2477US9044793B2Method for cleaning film formation apparatus and method for manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2012·Granted Jun 2, 2015·3 cites·18 claims
- 2575US8592908B2Semiconductor substrate and manufacturing method of semiconductor deviceYAMAZAKI SHUNPEI·Filed 2011·Granted Nov 26, 2013·3 cites·20 claims
- 2675US7989273B2Semiconductor substrate and manufacturing method of semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2008·Granted Aug 2, 2011·5 cites·21 claims
- 2773US8101467B2Liquid crystal display device and method for manufacturing the same, and liquid crystal television receiverYAMAZAKI SHUNPEI·Filed 2004·Granted Jan 24, 2012·14 cites·20 claims
- 2871US9006046B2Deposition method and method for manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2013·Granted Apr 14, 2015·1 cites·14 claims
- 2969US7211454B2Manufacturing method of a light emitting device including moving the source of the vapor deposition parallel to the substrateSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted May 1, 2007·13 cites·18 claims
- 3066US8309406B2Method for manufacturing semiconductor deviceYAMAZAKI SHUNPEI·Filed 2011·Granted Nov 13, 2012·1 cites·10 claims
- 3166US7692232B2Nonvolatile semiconductor memory deviceSEMICONDUCTOR ENERGY LAB·Filed 2007·Granted Apr 6, 2010·2 cites·32 claims
- 3263US8030147B2Method for manufacturing thin film transistor and display device including the thin film transistorSEMICONDUCTOR ENERGY LAB·Filed 2008·Granted Oct 4, 2011·1 cites·30 claims
- 3361US10529556B2Deposition method and method for manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2017·Granted Jan 7, 2020·0 cites·13 claims
- 3460US8846530B2Method for forming semiconductor region and method for manufacturing power storage deviceFURUNO MAKOTO·Filed 2011·Granted Sep 30, 2014·1 cites·16 claims
- 3558US8212302B2Nonvolatile semiconductor memory deviceYAMAZAKI SHUNPEI·Filed 2007·Granted Jul 3, 2012·1 cites·67 claims
- 3658US7947544B2Method of manufacturing semiconductor device, film deposition method, and film deposition apparatusSEMICONDUCTOR ENERGY LAB·Filed 2008·Granted May 24, 2011·0 cites·9 claims
- 3756US9698008B2Deposition method and method for manufacturing semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 2015·Granted Jul 4, 2017·0 cites·14 claims
- 3856US8247307B2Manufacturing method of substrate provided with semiconductor filmsYAMAZAKI SHUNPEI·Filed 2009·Granted Aug 21, 2012·0 cites·12 claims
- 3953US8643182B2Semiconductor film, method for manufacturing the same, and power storage deviceSEMICONDUCTOR ENERGY LAB·Filed 2013·Granted Feb 4, 2014·0 cites·16 claims
- 4051US8242562B2Film deposition apparatusYAMAZAKI SHUNPEI·Filed 2011·Granted Aug 14, 2012·0 cites·19 claims
- 4145US2012003383A1Manufacturing method of energy storage deviceFURUNO MAKOTO·Filed 2011·Application pending·0 cites
- 4243US8227863B2Nonvolatile semiconductor memory deviceYAMAZAKI SHUNPEI·Filed 2007·Granted Jul 24, 2012·0 cites·43 claims
- 4340US8247315B2Plasma processing apparatus and method for manufacturing semiconductor deviceFURUNO MAKOTO·Filed 2009·Granted Aug 21, 2012·0 cites·3 claims
- 4439US6306183B1Method of forming manufacturing semiconductor deviceSONY CORP·Filed 1997·Granted Oct 23, 2001·6 cites·2 claims
- 4535US2013023108A1Method for manufacturing soi substrateSEMICONDUCTOR ENERGY LAB·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →