Inventor · disambiguated record
Mark W. Haley
Also filed as: HALEY MARK · HALEY MARK W
6 granted patents·1 pending application·89 citations·filing 1994–2001
83Inventor score
Top patents by PatentIndex Score
7 records- 0167US5953200AMultiple pole electrostatic chuck with self healing mechanism for wafer clampingVLSI TECHNOLOGY INC·Filed 1998·Granted Sep 14, 1999·37 cites·9 claims
- 0261US6690083B1Use of silicide blocking layer to create high valued resistor and diode for sub-1V bandgapKONINKL PHILIPS ELECTRONICS NV·Filed 2000·Granted Feb 10, 2004·10 cites·7 claims
- 0349US6355576B1Method for cleaning integrated circuit bonding padsVLSI TECHNOLOGY INC·Filed 1999·Granted Mar 12, 2002·16 cites·1 claims
- 0449US5917327ATechnique and apparatus for testing electrostatic chucksVLSI TECHNOLOGY INC·Filed 1997·Granted Jun 29, 1999·16 cites·19 claims
- 0537US6306746B1Backend process for fuse link openingKONINKL PHILIPS ELECTRONICS NV·Filed 1999·Granted Oct 23, 2001·9 cites·20 claims
- 0632US2002028586A1Method and apparatus for cleaning integrated circuit bonding padsFiled 2001·Application pending·0 cites
- 0724US5600236AConverter and digital channel selectorVLSI TECHNOLOGY INC·Filed 1994·Granted Feb 4, 1997·1 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →